Effects of static load and residual stress on fused silica direct bonding interface properties

Abstract Defect free direct bonding of rigid and large area glass samples, such as prisms, becomes increasingly important for the manufacturing modern optical optomechanical components. Typically, in order to apply a static load during annealing step, specialized heat-resistant pressure mountings are required. This makes effortful cost-intensive. In this paper, we present plasma activated experiments conducted on fused silica plates where residual stress has been introduced prior contacting step is performed with without load. We find that case sufficiently smooth surface, strength insensitive towards or load, more precisely, interface stress. Furthermore, Fresnel reflection losses realized were optically measured they amount only $$10^{-6}$$ 10 - 6 . propose consideration change Gibbs energy, d G , allows qualitatively predicting resulting its spatial distribution, determined by surface energy At end article, conceivable applications discussed.